Nippon Chemical Industrial Co.,Ltd.
Product Information Semiconductor Materials

High Purity Phosphine Gas

Liquefied phosphine gas with a purity of 98 vol% is purified through a multi-stage refining process, achieving a purity level of 99.9999 vol% suitable for semiconductor materials. Applications can be broadly divided into doping materials for converting Si into n-type semiconductors, and raw materials for phosphorus-based compound semiconductors, including GaP and InP. Si semiconductors are used in electronic components, including central processing units (CPUs), memory, sensors, and power devices, while compound semiconductors are used as light-emitting and light-receiving elements in light-emitting diode (LED) lighting, optical disc drives, and various optical devices for optical communications.
Product NameCAS RN®Structural FormulaChemical NameSynonymsChemical FormulaMain PurposesCondition
High Purity Phosphine Gas7803-51-2PhosphinePhosphanePH3Semiconductor Dopant AgentsLiquefied gas

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